
Jae
Hee Ha
Manager
in SRAM Process Team
Hyundai Electronics Industries Company
Jae Hee Ha is manager of Hyundai Electronics Industries
Company. Hyundai Electronics is an industry leader in
the development, manufacturing, sales, marketing, and
distribution of high-quality Semiconductors, Telecommunications,
and Liquid Crystal Displays. The Semiconductor Group
of Hyundai Electronics is the world's largest DRAM supplier
with eleven semiconductor manufacturing facilities world
wide.
Jae Hee Ha is currently in charge of developing processes
for Fast SRAM devices. She focuses on improving device
speed and standby current by using logic-based processes
in full CMOS SRAM devices. She is also interested in
minimizing process steps and mask layers to achieve
profitable processes.
Prior to joining Fast SRAM Process Team, she spent a
total of nine years as a etch section manager in research
and development laboratories. During these years, she
worked on developing core etch technologies for 64M/256M/1G
DRAM and logic devices, plasma tool prototyping and
evaluation, optical diagnostics for robust production,
investigating plasma-induced damage to device characteristics,
and optimizing etch processes with designed experiments
for fast time to market. For the statistical control
of manufacturing processes, she concentrated her effort
on evaluating quality control of electrical and in-line
measurements, modelling etch rate and profile thermodynamically,
predicting performance improvement of new inter-layer
dielectric and gate materials and salicidation processes.
In order to preoccupy the advanced etch technologies
for next generation devices, she actively organized
the joint development projects with major etcher makers
and participated in the nanotechnology project with
Seoul National University. She has numerous technical
papers published, gave talks internationally, and thirty
six patents issued or filed in the field of etching
technology and manufacturing method for semiconductor
devices.
Jae Hee Ha holds a bachelor's degree in chemistry from
Korea University in Seoul Korea; a master's degree in
physical chemistry from University of California, Los
Angeles;a Ph.D. in physical chemistry from University
of British Columbia.
She has been working as a committee member of Semicon
Korea and was awarded a prize in recognition of her
active services to Semicon Korea Organization in 1999.