Jae Hee Ha

Manager in SRAM Process Team
Hyundai Electronics Industries Company

Jae Hee Ha is manager of Hyundai Electronics Industries Company. Hyundai Electronics is an industry leader in the development, manufacturing, sales, marketing, and distribution of high-quality Semiconductors, Telecommunications, and Liquid Crystal Displays. The Semiconductor Group of Hyundai Electronics is the world's largest DRAM supplier with eleven semiconductor manufacturing facilities world wide.

Jae Hee Ha is currently in charge of developing processes for Fast SRAM devices. She focuses on improving device speed and standby current by using logic-based processes in full CMOS SRAM devices. She is also interested in minimizing process steps and mask layers to achieve profitable processes.

Prior to joining Fast SRAM Process Team, she spent a total of nine years as a etch section manager in research and development laboratories. During these years, she worked on developing core etch technologies for 64M/256M/1G DRAM and logic devices, plasma tool prototyping and evaluation, optical diagnostics for robust production, investigating plasma-induced damage to device characteristics, and optimizing etch processes with designed experiments for fast time to market. For the statistical control of manufacturing processes, she concentrated her effort on evaluating quality control of electrical and in-line measurements, modelling etch rate and profile thermodynamically, predicting performance improvement of new inter-layer dielectric and gate materials and salicidation processes. In order to preoccupy the advanced etch technologies for next generation devices, she actively organized the joint development projects with major etcher makers and participated in the nanotechnology project with Seoul National University. She has numerous technical papers published, gave talks internationally, and thirty six patents issued or filed in the field of etching technology and manufacturing method for semiconductor devices.

Jae Hee Ha holds a bachelor's degree in chemistry from Korea University in Seoul Korea; a master's degree in physical chemistry from University of California, Los Angeles;a Ph.D. in physical chemistry from University of British Columbia.

She has been working as a committee member of Semicon Korea and was awarded a prize in recognition of her active services to Semicon Korea Organization in 1999.

 
 
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